사업분류

  • 신 기술적용을 통한 수율 향상!!
    • 1. N2 Load Port Purge system

      - LPM/BIP N2 Purge system

    • 2. Justem Flow Straightener
    • 3. Contamination Free Buffer
    Semiconductor
  • High Capacity &
    Better Performance !!
    • 1. 저진공/고진공 대면적 물류 장비
    • 2. Manufacturing & install
    • 3. Contamination Free Buffer
    Display (LCD&OLED)
  • PECVD & MOCVD 제조 !!
    • 1. Module & Parts

      - PECVD Installation

      - MOCVD Installation

    • 2. Module & Parts

      - Cassette Loading Module

      - Wafer Transfer & Conveyer

      Module

      - PECVD Reactor

    Solar cell